WebOne of the advantages of our HDRF (high density radical flux) ... Plasma-Therm’s Post Plasma-Therm 4,671 followers 1y Report this post Report Report. Back ... WebThe company’s High Density Radical Flux (HDRF®) plasma-processing technology delivers sophisticated cleaning techniques for removing Bosch polymers, resistant residues, and photoresist at low...
(PDF) Principle and benefits of the HDRF plasma process as Remote Pl…
WebKayen HDRF™ is a unique plasma-based system for photoresist removal and wafer surface treatment. It’s the most efficient and cost-effective system available for microelectronics … WebYou could try HDRF tool, like Odyssey from Plasma-Therm, with a recipe able to provide high flow of radicals H* , and/or OH or HF (that depend on additive gas), and with no ions. Cite … lbg chamber
Plasma-Therm: HDRF
WebNov 3, 2015 · Plasma-Therm is integrating HDRF technology into its existing suite of plasma etching, deposition, and wafer-dicing products. The Nanoplas-developed HDRF low-temperature photoresist stripping capability is also applicable to Bosch polymer removal after DRIE (deep reactive ion etch) processing. WebCompanies like Neuralink on the cutting edge of technology are using the broad range of Plasma-Therm systems — VERSALINE®, Vision™ series, LAPECVD™, Odyssey™ & Navigator™ HDRF ... WebHDRF™ is a unique plasma-based system for photoresist removal and wafer surface treatment. It’s the most efficient and cost-effective system available for microelectronics manufacturing today. Unlike conventional … keller williams legacy sandra rathe